研究者業績

内田 寛

ウチダ ヒロシ  (Uchida Hiroshi)

基本情報

所属
上智大学 理工学部物質生命理工学科 教授
学位
修士(工学)(1997年3月 上智大学)
博士(工学)(2001年1月 東京工業大学)

連絡先
uchidahsophia.ac.jp
研究者番号
60327880
J-GLOBAL ID
200901055907958881
researchmap会員ID
1000367338

上智大学 理工学部物質生命理工学科 無機工業化学グループ

(上智大学大学院 理工学研究科理工学専攻 応用化学領域)

 

主要な研究テーマ:

  • 溶液プロセスを主体とした無機マイクロ・ナノ材料製造技術の研究開発(低温合成・組成制御・三次元加工・化学溶液堆積・水熱合成・超臨界流体)
  • エレクトロニクス&エネルギーデバイス用新規化合物の探索(誘電体・圧電体・半導体/高性能材料・環境調和型材料)

 

近年の活動内容:

  • 溶液プロセスによる高性能な強誘電体/圧電体薄膜の製造技術開発
  • 環境親和型強誘電体/圧電体薄膜材料の探索
  • 水熱合成プロセスによる無機材料薄膜の創製
  • 超臨界流体を用いた無機材料合成プロセスの開発


論文

 237
  • Weirong Yang, Hiroshi UCHIDA, Taro Kuwano, Hiroki TANIGUCHI, Shintaro Yasui
    Japanese Journal of Applied Physics 2026年7月31日  査読有り
    Abstract Lead-free antiferroelectric (AFE) materials with non-perovskite structures are of increasing interest for environmentally friendly high-power energy storage applications. Titanite CaTiSiO 5 thin films with different thicknesses were fabricated on (111)Pt/(100)Si substrates by pulsed laser deposition. Post-annealing under oxygen partial pressures of 50 Torr or higher reduced the leakage current density, owing to the suppression of oxygen-vacancy-related defects. XRD analysis confirmed the formation of single-phase monoclinic P 2 1 / a titanite films with 011 preferred orientation. The Lotgering factor for the 011 orientation reached approximately 0.8 for films thicker than 280 nm. With increasing thickness, the relative permittivity decreased from approximately 100 to 50, approaching the value reported for bulk titanite. Films thicker than 280 nm exhibited clear double polarization–electric field hysteresis loops, confirming stable antiferroelectric behavior. These results reveal the thickness-dependent evolution of texture growth and electrical properties in titanite CaTiSiO 5 thin films.
  • Hiroshi UCHIDA, Ryohei Okamoto, Takuma Ito, Yukie Yokota, Hiromi SHIMA, Yoshitaka Ehara, Hiroshi Funakubo
    Japanese Journal of Applied Physics 65(15) 15SP04 2026年7月24日  査読有り筆頭著者最終著者責任著者
    Abstract The compositional dependence of phase-formation behavior in fluorite-type ferroelectric films of the binary HfO 2 – ZrO 2 system was systematically evaluated while considering the size effect associated with film thickness. The crystalline phase of the CSD-derived films (1- x ) HfO 2 - x ZrO 2 films ( x = 0 - 1.00) generally exhibited a transition from the monoclinic fluorite (m-phase) to orthorhombic and / or tetragonal phases (o-/t-phase) with increasing the ZrO 2 content. However, the phase boundary between m-phase and o-/t-phases shifted toward the ZrO 2 -rich region as the film thickness decreased. The composition exhibiting enhanced ferroelectricity also shifted toward the ZrO 2 -rich side, coincident with the phase boundary: the 40 nm-thick films showed the maximum remnant polarization at x = 0.75, which is noticeably different from the commonly reported optimum composition of x = 0.50 (i.e., Hf0.5Zr0.5O 2 ) for ultrathin (~9 nm) films.
  • Tatsuya Masuda, Hiromi SHIMA, Hiroshi UCHIDA, Shintaro Yasui, Hiroki MORIWAKE, Yoshitaka Ehara
    Japanese Journal of Applied Physics 64 10SP01 2025年9月11日  査読有り
    Abstract This study systematically investigated the role of Ba(OH)2 concentration on the properties of thin films. Films of (001)-oriented barium titanate (BaTiO3) were grown on (100) La-doped SrTiO3 substrates at 200°C by hydrothermal synthesis. X-ray diffraction analysis confirmed the films showed epitaxial and highly (100)-oriented growth with no secondary phases. The as-deposited films exhibited a significant unit cell volume expansion relative to bulk BaTiO3, which is attributed to the incorporation of hydroxyl (OH-) groups inherent in the hydrothermal process. Scanning electron microscopy revealed that a high Ba(OH)2 concentration (2.0 mol dm⁻3) was essential to achieving a uniform film approximately 150 nm thick, lower concentrations resulted in discontinuous growth. The dense film exhibited a clear ferroelectric domain structure and good dielectric properties. These results demonstrate that precise control over precursor concentration is a key factor in fabricating high-quality epitaxial ferroelectric oxide thin films via low-temperature hydrothermal methods.
  • Kohei Noji, Yukie Yokota, Hiromi Shima, Hiroshi Funakubo, Hiroshi Uchida
    Journal of the Ceramic Society of Japan 133(7) 281-287 2025年7月1日  査読有り責任著者
  • Yukie Yokota, Nazuna Itabashi, Mari Kawaguchi, Hiroshi Uchida, Nick Serpone, Satoshi Horikoshi
    Molecules 2025年4月  

MISC

 60

書籍等出版物

 5
  • 大倉利典, 小嶋, 芳行, 相澤, 守, 内田, 寛, 柴田, 裕史 (担当:共著)
    培風館 2023年6月7日 (ISBN: 4563046418)
  • (担当:分担執筆, 範囲:p.94-99, 「水熱合成技術を利用した非鉛系ペロブスカイト型酸化物エピタキシャル構造体の高速製造プロセス」)
    2020年12月10日
  • 内田 寛 (担当:分担執筆, 範囲:p.389-399, 第10章第4節「ペロブスカイト型強誘電体・圧電体薄膜の結晶配向性制御による分極特性の改善」)
    情報通信協会 2020年8月31日
  • 内田 寛 (担当:分担執筆, 範囲:p.389-399 「化学的薄膜堆積 . 超臨界流体を用いたエッチング加工」)
    コロナ社 2012年9月6日 (ISBN: 9784339008371)
  • (担当:分担執筆, 範囲:p.116-119, 「エピタキシャル薄膜における応力解析技術」)
    2001年9月20日

講演・口頭発表等

 105

共同研究・競争的資金等の研究課題

 21

産業財産権

 8